1.

Conference Proceedings
Conference Proceedings
1. Electrochemistry of Ta in Aqueous HF
I. Suni
Pub. info.: Electrochemical Processing in ULSI and MEMS 2.  pp.439-444,  2007.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 2(6)
2.

Conference Proceedings
Conference Proceedings
2. Fabrication of InP/SiO2/Si Substrate using Ion-Cuffing Process and Selective Chemical Etching
P. Chen ; D. Xu ; L. Mawst ; K. Henttinen ; T. Suni ; I. Suni ; T. Kuech ; S. Lau
Pub. info.: Advanced gate stack, source/drain and channel engineering for Si-based CMOS 3 : new materials, processes and equipment.  pp.99-104,  2007.  Pennington, NJ.  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 6(1)