Sasaki, S. ; Ohfuji, T. ; Kurihara, M. ; Inomata, H. ; Jackson, C.A. ; Murata, Y. ; Totsukawa, D. ; Tsugama, N. ; Kitano, N. ; Hayashi, N. ; Hwang, D.H.
Pub. info.:
22nd Annual BACUS Symposium on Photomask Technology. Part One pp.599-606, 2002. Bellingham, WA. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Photomask and Next-Generation Lithography Mask Technology XI. pp.9-18, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering