1.

Conference Proceedings
Conference Proceedings
1. Comparison between the atomic force microscopy and x-ray reflectivity on the characterization of the roughness of a surface
Su, H.-C. ; Lin, M.-Z. ; Huang, T.-W. ; Lee, C.-H.
Pub. info.: Testing, Reliability, and Application of Micro- and Nano-Material Systems II.  pp.123-131,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5392
2.

Conference Proceedings
Conference Proceedings
2. Microlens-induced pattern defect in DUV resist
Tsai, S.-F. ; Chen, C.-Y. ; Chang, C.-C. ; Huang, T.-W. ; Gao, H.-Y. ; Ku, C.-Y.
Pub. info.: Advances in Resist Technology and Processing XXI.  pp.1149-1156,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5376