1.

Conference Proceedings
Conference Proceedings
1. Antiresonant reflecting optical waveguide surface plasmon resonace sensors
Huang, Y.-T. ; Chang, W.-Z. ; Hsu, S.-H. ; Chen, C.-H. ; Chen, J.-C.
Pub. info.: Device and process technologies for MEMS and Microelectronics II : 17-19 December 2001, Adelaide, Australia.  pp.299-306,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4592
2.

Conference Proceedings
Conference Proceedings
2. Practical approach for AAPSM image imbalance correction for sub-100-nm lithography
Cho, H.L. ; Lin, S.Y. ; Hsieh, F. ; Kroyan, A. ; Liu, H.-Y. ; Huang, J.H. ; Hsu, S.-H. ; Huang, I-H. ; Lin, B.S.-M. ; Hung, K.-C.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology X.  pp.778-786,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5130
3.

Conference Proceedings
Conference Proceedings
3. Extension of ArF lithography for poly gate patterning of 65-nm generation and beyond
Hsu, S.-H. ; Fang, S.-P. ; Huang, I.H. ; Lin, B.S. ; Hung, K.-C.
Pub. info.: Optical Microlithography XVII.  pp.1214-1224,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5377