1.

Conference Proceedings
Conference Proceedings
1. LOW RESISTIVITY CoSi2 SURFACE LAYERS FOR USE AS CONTACTS IN CMOS PROCESSES
Audet, Sarah A. ; Rafferty, Connor S. ; White, Alice E. ; Short, Ken T. ; Hsieh, Yong-Fen
Pub. info.: Rapid thermal and integrated processing : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A..  pp.109-114,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 224
2.

Conference Proceedings
Conference Proceedings
2. EVOLUTION OF BURIED COBALT SILICIDE LAYERS FORMED BY Co IMPLANTATION IN Si(111)
Hsieh, Yong-Fen ; Hull, Robert ; White, Alice E. ; Short, Ken T.
Pub. info.: Evolution of thin-film and surface microstructure : symposium held November 26-December 1, 1990, Boston, Massachusetts, U.S.A..  pp.665-672,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 202