1.

Conference Proceedings
Conference Proceedings
1. Dopants in Electroplated Copper
Andricacos, P.C. ; Parks, C. ; Cabral, C. ; Wachnik, R. ; Tsai, R. ; Maihotra, S. ; Locke, P. ; Fluegel, J. ; Horkans, J. ; Kwietniak, K. ; Uzoh, C. ; Rodbell, K.P. ; Gignac, L. ; Walton, E. ; Chung, D. ; Geffren, R.
Pub. info.: Electrochemical processing in ULSI fabrication and semiconductor/metal deposition II : proceedings of the international symposium.  pp.111-121,  1999.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-9
2.

Conference Proceedings
Conference Proceedings
2. Model of Superfilling in Damascene Electroplating: Comparison of Experimental Feature Filling with Model Predictions
Deligianni, H. ; Horkans, J. ; Kwietniak, K. ; Dukovic, J.O. ; Andricacos, P.C. ; Boettcher, S. ; Seo, S.-C. ; Locke, P. ; Simon, A. ; Seymour, S. ; Malhotra, S.
Pub. info.: Electrochemical processing in ULSI fabrication III : proceedings of the international symposium.  pp.145-160,  2000.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-8
3.

Conference Proceedings
Conference Proceedings
3. Damascene Electroplating for Copper Interconnections
Andriacacos, P.C. ; Uzoh, C. ; Dukovic, J.O. ; Horkans, J. ; Deligianni, H.
Pub. info.: Proceedings of the Symposia on Electrochemical Processing in ULSI Fabrication I and Interconnect and Contact Metallization: materials, processes, and reliability.  pp.48-58,  1998.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-6
4.

Conference Proceedings
Conference Proceedings
4. 3. Electrochemical fabrication of PbSn C4 Interconnections
Datta, M. ; Shenoy, R.V. ; Jahnes, C. ; Andricacos, P.C. ; Horkans, J. ; Dukovic, J.O. ; Romankiw, L.T. ; Roeder, J. ; Deligianni, H. ; Nye, H. ; Agarwala, B. ; Tong, H.M. ; Totta, P.
Pub. info.: Proceedings of the Second International Symposium on Electrochemical Microfabrication.  pp.35-44,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-32
5.

Conference Proceedings
Conference Proceedings
5. Electrodeposition for Hi-MEMS With Special Reference to Fabrication of a Magnetic Mini-Motor
O'Sullivan, E. J. ; Cooper, E. I. ; Ramankiw, L. T. ; Horkans, J. ; Kwietniak, K. T.
Pub. info.: Electrochemical synthesis and modification of materials : symposium held December 2-5, 1996, Boston, Massachusetts, U.S.A..  pp.389-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 451