1.

Conference Proceedings
Conference Proceedings
1. Dry release process of anhydrous HF gas-phase etching for the fabrication of a vibrating microgyroscope
Jang,W.I. ; Choi,C.A. ; Hong,Y.S. ; Jun,C.H. ; Kim,Y.T. ; Lee,J.H.
Pub. info.: Device and process technologies for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia.  pp.332-339,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3892
2.

Conference Proceedings
Conference Proceedings
2. Silicon surface micromachining by anhydrous HF gas-phase etching with methanol
Jang,W.I. ; Choi,C.A. ; Lee,C.S. ; Hong,Y.S. ; Lee,J.H. ; Baek,J.T. ; Kim,B.W.
Pub. info.: Micromachining and microfabrication process technology IV : 21-22 September, 1998, Santa Clara, California.  pp.143-150,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3511
3.

Conference Proceedings
Conference Proceedings
3. Control and modeling of stress in multistacked polysilicon films considering oxidation effect
Lee,C.S. ; Jang,W.I. ; Choi,C.A. ; Hong,Y.S. ; Lee,J.H. ; No,K. ; Wee,D.M.
Pub. info.: Micromachining and microfabrication process technology IV : 21-22 September, 1998, Santa Clara, California.  pp.315-324,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3511