1.

Conference Proceedings
Conference Proceedings
1. DEPOSITION OF POLYCRYSTALLINE SILICON THIN FILMS BY PLASMA ENHANCED CVD
Hollingsworth, Russell E. ; Bhat, Pawan K.
Pub. info.: Microcrystalline semiconductors : materials science & devices : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A..  pp.659-664,  1993.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 283
2.

Conference Proceedings
Conference Proceedings
2. Direct Patterning of Hydrogenated Amorphous Silicon by Near Field Scanning Optical Microscopy
Hollingsworth, Russell E. ; Bradford, William C. ; Herndon, Mary K. ; Beach, Joseph D. ; Collins, Reuben T.
Pub. info.: Materials development for direct write technologies : symposium held April 24-26, 2000, San Francisco, California, U.S.A..  pp.87-98,  2001.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 624