1.

Conference Proceedings
Conference Proceedings
1. Achieving sub-half-micron i-line manufacturability through automated OPC
Garza,M. ; Jackson,E. ; Shen,W.P. ; Eib,N.K. ; Sabouri,S. ; Hollerbach,U. ; Felmlee,T.L. ; Raghavan,V.N.V. ; Wang,K.C. ; Barouch,E. ; Orszag,S.A. ; Chao,K.K. ; Jensen,J.
Pub. info.: Emerging lithographic technologies : 10-11 March 1997, Santa Clara, California.  pp.382-395,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3048
2.

Conference Proceedings
Conference Proceedings
2. Net-Faim: distributed computation of aerial images
Hollerbach,U.
Pub. info.: Optical microlithography XI : 25-27 February 1998, Santa Clara, California.  pp.803-813,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3334
3.

Conference Proceedings
Conference Proceedings
3. Effects of off-axis illumination and scatterirng-bar optical proximity correction on the impact of lens aberration on 130-nm polygate mask:a simulation study
Nakagawa,K.H. ; Hollerbach,U. ; Chen,J.F.
Pub. info.: Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA.  Part2  pp.1070-1078,  2000.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4000
4.

Conference Proceedings
Conference Proceedings
4. Effects of advanced illumination schemes on design manufacturability and interactions with optical proximity corrections
Capodieci,L. ; Torres,J.A. ; Socha,R.J. ; Hollerbach,U. ; Chen,J.F. ; Os,C.van ; Granik,Yu. ; Toublan,O. ; Cobb,N.B.
Pub. info.: Challenges in process integration and device technology : 18-19 September 2000, Santa Clara, USA.  pp.58-67,  2000.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4181