1.

Conference Proceedings
Conference Proceedings
1. Optimization techniques for plasma etching of thermoset polymer for microfluidic channels
Cher, C.V. ; Holland, A.S. ; Rosengarten, G.
Pub. info.: BioMEMS and nanotechnology : 10-12 December 2003, Perth, Australia.  pp.123-132,  2004.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5275
2.

Conference Proceedings
Conference Proceedings
2. Effects of Non-Planar Surfaces on the Growth of RF Magnetron Sputtered ZnO
Holland, A.S. ; Reeves, G.K. ; Leech, P.W.
Pub. info.: Mechanisms of surface and microstructure evolution in deposited films and film structures : symposium held April 17-20, 2001, San Francisco, California, U.S.A..  2001.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 672
3.

Conference Proceedings
Conference Proceedings
3. Patterning of SU-8 resist structures using CF4
Vora, K.D. ; Holland, A.S. ; Ghantasala, M.K. ; Mitchell, A.
Pub. info.: Device and process technologies for MEMS, microelectronics, and photonics III : 10-12 December 2003, Perth, Australia.  pp.162-172,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5276