Allen, R. D. ; Opitz, J. ; Ito, H. ; Wallow, T. I. ; Casmier, D. V. ; DiPietro, R. A. ; Brock, P. J. ; Breyta, G. ; Sooriyakumaran, R. ; Larson, C. E. ; Hofer, D. C. ; Varanasi, P. R. ; Mewherter, A. M. ; Jayaraman, S. ; Vicari, R. ; Rhodes, L. F. ; Sun, S.
Pub. info.:
Microlithography 1999 : advances in resist technology and processing XVI : 15-17 March 1999, Santa Clara, California. pp.66-77, 1999. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Varanasi, P. R. ; Maniscalco, J. ; Mewherter, A. M. ; Lawson, M. C. ; Jordhamo, G. ; Allen, R. D. ; Opitz, J. ; Ito, H. ; Wallow, T. I. ; Hofer, D. C. ; Langsdorf, L. ; Jayaraman, S. ; Vicari, R.
Pub. info.:
Microlithography 1999 : advances in resist technology and processing XVI : 15-17 March 1999, Santa Clara, California. pp.51-65, 1999. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Wallow, T. I. ; Brock, P. J. ; DiPietro, R. A. ; Allen, R. D. ; Opitz, J. ; Sooriyakumaran, R. ; Hofer, D. C. ; Mewherter, A. M. ; Cui, Y. ; Yan, W. ; Worth, G. ; Moreau, W. M. ; Meute, J. ; Byers, J. D. ; Rich, G. K. ; McCallum, M. ; Jayaraman, S. ; Vicari, R. ; Cagle, J. ; Sun, S. ; Hullihen, K. A.
Pub. info.:
Microlithography 1999 : advances in resist technology and processing XVI : 15-17 March 1999, Santa Clara, California. pp.26-35, 1999. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Opitz, J. ; Allen, R. D. ; Breyta, G. ; Hofer, D. C. ; Sundararajan, N. ; Ober, C. K.
Pub. info.:
Microlithography 1999 : advances in resist technology and processing XVI : 15-17 March 1999, Santa Clara, California. pp.1096-1105, 1999. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Wallow, T. I. ; Brock, P. J. ; Truong, H. ; Allen, R. D. ; Opitz, J. ; Hofer, D. C.
Pub. info.:
Microlithography 1999 : advances in resist technology and processing XVI : 15-17 March 1999, Santa Clara, California. pp.1106-1113, 1999. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Lin, Q. ; Petrillo, K. E. ; Babich, K. ; Tulipe, D. C. La ; Medeiros, D. ; Mahorowala, A. ; Simons, J. P. ; Angelopoulos, M. ; Wallraff, G. M. ; Larson, C. E. ; Fenzel-Alexander, D. ; Sooriyakumaran, R. ; Breyta, G. ; Brock, P. J. ; DiPietro, R. A. ; Hofer, D. C.
Pub. info.:
Microlithography 1999 : advances in resist technology and processing XVI : 15-17 March 1999, Santa Clara, California. pp.241-250, 1999. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering