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Conference Proceedings

1. Plasma diagnostics in KrF excimer laser deposition of Ti thin films

Hong,M.H. ; Lu,Y.F. ; Ho,T.M. ; Lu,L.W. ; Low,T.S.

Pub. info.:	Laser processing of materials and industrial applications II : 16-19 September 1998, Beijing, China. pp.441-449, 1998. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3550

Conference Proceedings

2. KrF excimer laser deposition of titanium thin films on silicon substrates

Lu,L.W. ; Lu,Y.F. ; Hong,H. ; Ho,T.M. ; Low,T.S.

Pub. info.:	Laser processing of materials and industrial applications II : 16-19 September 1998, Beijing, China. pp.110-119, 1998. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3550