Ultrathin SiO[2] and high-K materials for USLI gate dielectrics : symposium held April 5-8, 1999, in San Francisco, California, U.S.A.. pp.169-, 1999. Warrendale, PA. MRS - Materials Research Society
Kuhne, H. ; Kissinger, G. ; Zaumseil, P. ; Hinrich, S. ; Richter, H.
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Evolution of surface and thin film microstructure : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A.. pp.183-188, 1993. Pittsburgh, Pa.. Materials Research Society