1.

Conference Proceedings
Conference Proceedings
1. Performance data of a variable transmission phase shifting mask blank for 193nm lithography enhanced by inspection contrast tuning [5963-19]
Becker, H. ; Renno, M. ; Hermanns, U. ; Seitz, H. ; Buttgereit, U. ; Knapp, K. ; Hess, G.
Pub. info.: Advances in optical thin films II : 13-15 September 2005, Jena, Germany.  pp.59630J-,  2005.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5963
2.

Conference Proceedings
Conference Proceedings
2. The OmegaCAM 16K x 16K CCD detector system for the ESO VLT Survey Telescope (VST) [6276-11]
Iwert, O. ; Baade, D. ; Balestra, A. ; Baruffolo, A. ; Bortolussi, A. ; Christen, F. ; Cumani, C. ; Deiries, S. ; Downing, M. ; Geimer, C. ; Hess, G. ; Hess, J. ; Kuijken, K. ; Lizon, J. ; Muschielok, B.
Pub. info.: High energy, optical, and infrared detectors for astronomy II : 24-27 May, 2006, Orlando, Florida, USA.  pp.62760A-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6276
3.

Conference Proceedings
Conference Proceedings
3. LGS implementation for NAOS
Kasper, M. E. ; Charton, J. ; Delabre, B. ; Donaldson, R. ; Fedrigo, E. ; Hess, G. ; Hubin, N. N. ; Lizon, J. -L. ; Nylund, M. ; Soenke, C. ; Zins, G.
Pub. info.: Advancements in adaptive optics : 21-25 June 2004, Glasgow, Scotland, United Kingdom.  pp.1071-1078,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5490
4.

Conference Proceedings
Conference Proceedings
4. The first full-field EUV masks ready for printing [6281-07]
Mickan, U. ; Groeneveld, R. ; Demarteau, M. ; Peters, H. J. ; Dersch, U. ; Hess, G. ; Seitz, H.
Pub. info.: EMLC 2006 : 22nd European Mask and Lithography Conference : 23-26 January 2006, Dresden, Germany.  pp.628105-628105,  2006.  Bellingham, Wash.,.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6281
5.

Conference Proceedings
Conference Proceedings
5. Germanium on SiC(0001): Surface Structure and Nanocrystals
Schroeter, B. ; Komlev, K. ; Kaiser, U. ; Hess, G. ; Kipshidze, G. ; Richter, W.
Pub. info.: Silicon carbide and related materials : ECSCRM2000, proceedings of the 3rd European Conference on Silicon Carbide and Related Materials, Kloster Banz, Germany, September 2000.  pp.247-250,  2001.  Uetikon-Zuerich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 353-356
6.

Conference Proceedings
Conference Proceedings
6. Asymmetric Charge Neutralization of DNA
Spasic, A. ; Hess, G. ; Becker, K. ; Hansen, M. ; Bleil, R. ; Mohanty, U.
Pub. info.: Nucleic Acids : curvature and deformation : recent advances and new paradigms.  pp.133-144,  2004.  Washington, D.C..  American Chemical Society
Title of ser.: ACS symposium series
Ser. no.: 884
7.

Conference Proceedings
Conference Proceedings
7. Antireflection solutions for next generation 193-nm binary and phase-shifting masks [5992-18]
Becker, H. ; Renno, M. ; Hermanns, U. ; Seitz, H. ; Buttgereit, U. ; Knapp, K. ; Hess, G.
Pub. info.: 25th Annual BACUS Symposium on Photomask Technology.  pp.59920I-,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5992
8.

Conference Proceedings
Conference Proceedings
8. NIL template manufacturing using a variable. shaped e-beam writer and a new pCAR [6151-42]
Irmscher, M. ; Butschke, J. ; Hess, G. ; Koepernik, C. ; Letzkus, F. ; Renno, M. ; Sailer, H. ; Schulz, H. ; Schwersenz, A. ; Thompson, E.
Pub. info.: Emerging Lithographic Technologies X.  pp.615115-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6151
9.

Conference Proceedings
Conference Proceedings
9. Template manufacturing for nanoimprint lithography using existing infrastructure [5992-87]
Irmscher, M. ; Butschke, J. ; Hess, G. ; Letzkus, F. ; Renno, M. ; Sailer, H. ; Schulz, H. ; Schwersenz, A. ; Thompson, E. ; Vratzov, B.
Pub. info.: 25th Annual BACUS Symposium on Photomask Technology.  pp.59922E-,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5992
10.

Conference Proceedings
Conference Proceedings
10. Process window enhancement for 45-nm node using alterable transmission phase-shifting materials [6349-19]
Becker, H. ; Renno, M. ; Hess, G. ; Buttgereit, U. ; Koepernik, C. ; Nedelmann, L. ; Irmscher, M. ; Birkner, R. ; Zibold, A. ; Scheruebl, T.
Pub. info.: Photomask Technology 2006.  pp.63490J-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6349