Luusua, Ismo ; Henttinen, Kimmo ; Pekko, Panu ; Vehmas, Tapani ; Luoto, Hannu
Pub. info.:
Micro- and nanosystems - materials and devices : symposium held March 28-April 1, 2005, San Francisco, California, U.S.A.. pp.77-84, 2005. Warrendale, Pa.. Materials Research Society
Kulawski, Martin ; Luoto, Hannu ; Henttinen, Kimmo ; Suni, Tommi ; Weimar, Frauke ; Makinen, Jari
Pub. info.:
Chemical-mechanical planarization - integration technology and realiability : symposium held March 28-31, 2005, San Francisco, California, U.S.A.. pp.111-116, 2005. Warrendale, Pa.. Materials Research Society
Kulawski, Martin ; Henttinen, Kimmo ; Suni, Ilkka ; Weimar, Frauke ; Makinen, Jari
Pub. info.:
Chemical-mechanical planarization : symposium held April 22-24, 2003, San Francisco, California, U.S.A.. pp.133-140, 2003. Warrendale, Pa.. Materials Research Society
Kulawski, Martin ; Luoto, Hannu ; Henttinen, Kimmo ; Suni, Ilkka ; Weimar, Franke ; Makinen, Jari
Pub. info.:
Advances in chemical-mechanical polishing : symposium held April 13-15, 2004, San Francisco, California, U.S.A.. pp.191-196, 2004. Warrendale, Pa.. Materials Research Society