1.

Conference Proceedings
Conference Proceedings
1. Influence of process parameters on the growth of pulsed-laser-deposited thin bismuth films
Boffoue,O. ; Lenoir,B. ; Hennet,L. ; Maloufi,N. ; Scherrer,H. ; Dauscher,A.
Pub. info.: ALT '97, International Conference on Laser Surface Processing : 8-12 September 1997, Limoges, France.  pp.61-67,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3404
2.

Conference Proceedings
Conference Proceedings
2. Precise measurement of ARC optical indices in the deep-UV range by variable-angle spectroscopic ellipsometry
Boher,P. ; Stehle,J.L. ; Piel,J.P. ; Defranoux,C. ; Hennet,L.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XI.  pp.205-214,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3050
3.

Conference Proceedings
Conference Proceedings
3. Characterization of resists and antireflective coatings by spectroscopic ellipsometry in the UV and deep-UV range
Boher,P. ; Piel,J.P. ; Defranoux,C. ; Stehle,J.-L. ; Hennet,L.
Pub. info.: Optical Microlithography IX.  Part2  pp.608-620,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2726