Copper interconnects, new contact metallurgies, structures, and low-k interlevel dielectrics : proceedings of the internatioal symposium. pp.15-21, 2002. Pennington, N.J.. Electrochemical Society
Copper Interconnects, New Contact Metallurgies/Structures, and Low-K Interlevel Dielectrics : proceedings of the International Symposium. pp.94-98, 2003. Pennington, N.J.. Electrochemical Society
King, G.C. ; Choi, S.H. ; Chu, S.-H. ; Kim, J.-W. ; Park, Y. ; Lillehei, P.T. ; Watt, G.D. ; Davis, R.C. ; Harb, J.N.
Pub. info.:
Smart structures and materials 2004 : smart electronics, MEMS, BioMEMS, and nanotechnology : 15-18 March 2004, San Diego, California, USA. pp.461-467, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Chu, S.-H. ; Choi, S.H. ; Watt, G.D. ; Kim, J.-W. ; Park, Y. ; Davis, R.C. ; Harb, J.N. ; King, G.C. ; Lillehei, P.T.
Pub. info.:
Smart structures and materials 2004 : smart electronics, MEMS, BioMEMS, and nanotechnology : 15-18 March 2004, San Diego, California, USA. pp.443-451, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering