1.

Conference Proceedings

Conference Proceedings
Tan, M. ; Hutchins, J. ; Harb, J.N.
Pub. info.: Copper interconnects, new contact metallurgies, structures, and low-k interlevel dielectrics : proceedings of the internatioal symposium.  pp.15-21,  2002.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-22
2.

Conference Proceedings

Conference Proceedings
Tan, M. ; Harb, J.N.
Pub. info.: Copper Interconnects, New Contact Metallurgies/Structures, and Low-K Interlevel Dielectrics : proceedings of the International Symposium.  pp.94-98,  2003.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-10
3.

Conference Proceedings

Conference Proceedings
Tan, M. ; Harb, J.N.
Pub. info.: Electrochemical processes in ULSI and MEMS : proceedings of the international symposium.  pp.34-40,  2005.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-17
4.

Conference Proceedings

Conference Proceedings
Humble, P.H. ; Harb, J.N.
Pub. info.: Micropower and microdevices : proceedings of the international symposium.  pp.1-15,  2002.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-25
5.

Conference Proceedings

Conference Proceedings
King, G.C. ; Choi, S.H. ; Chu, S.-H. ; Kim, J.-W. ; Park, Y. ; Lillehei, P.T. ; Watt, G.D. ; Davis, R.C. ; Harb, J.N.
Pub. info.: Smart structures and materials 2004 : smart electronics, MEMS, BioMEMS, and nanotechnology : 15-18 March 2004, San Diego, California, USA.  pp.461-467,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5389
6.

Conference Proceedings

Conference Proceedings
Chu, S.-H. ; Choi, S.H. ; Watt, G.D. ; Kim, J.-W. ; Park, Y. ; Davis, R.C. ; Harb, J.N. ; King, G.C. ; Lillehei, P.T.
Pub. info.: Smart structures and materials 2004 : smart electronics, MEMS, BioMEMS, and nanotechnology : 15-18 March 2004, San Diego, California, USA.  pp.443-451,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5389