1.

Conference Proceedings
Conference Proceedings
1. The study on causes and control methods of haze contamination
Han, S.-J. ; Kim, B.-H. ; Park, J.-H. ; Kim, Y.-H. ; Choi, S.-W. ; Han, W.-S
Pub. info.: Advanced microlithography technologies : 8-10 November, 2004, Beijing, China.  pp.109-113,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5645
2.

Conference Proceedings
Conference Proceedings
2. Study of characteristics and control of haze contamination induced by photochemical reaction
Han, S.-J. ; Yu, S.-Y. ; Sung, M.-G. ; Kim, Y.-H. ; Yoon, H.-S. ; Sohn, J.-M.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology X.  pp.563-567,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5130