1.

Conference Proceedings
Conference Proceedings
1. Behavior of Hydrogen in Al-4%Mg Alloys during Heat Treatment
H. Umeda ; G. Itoh ; Y. Kato
Pub. info.: THERMEC 2006 : supplement to THERMEC 2006, 5th International conference on processing and manufacturing of advanced materials, July 4-8, 2006, Vancouver, Canad.  539-543  pp.305-310,  2007.  Stafa-Zuerich.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 539-543(1)
2.

Conference Proceedings
Conference Proceedings
2. LPE Growth of Bulk GaN Crystal by Alkali-Metal Flux Method
F. Kawamura ; H. Umeda ; M. Morishita ; R. Gejo ; M. Tanpo
Pub. info.: Silicon carbide and related materials 2007 : selected peer reviewed papers from the International Conference on Silicon Carbide and Related Materials 2007, Otsu Prince Hotel Covention Hall, Lake Biwa Resort, Otsu, Japan, October 14-19, 2007.  pp.1245-1250,  2009.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 600-603
3.

Conference Proceedings
Conference Proceedings
3. High-power injection lock laser platform for ArF dry/wet lithography
H. Mizoguchi ; T. Inoue ; J. Fujimoto ; T. Yamazaki ; T. Suzuki ; T. Matsunaga ; S. Sakanishi ; M. Kaminishi ; Y. Watanabe ; T. Ohta ; M. Nakane ; M. Moriya ; T. Nakaike ; M. Shinbori ; M. Yoshino ; T. Kawasuji ; H. Nogawa ; T. Ito ; H. Umeda ; S. Tanaka ; H. Taniguchi ; Y. Sasaki ; J. Kinoshita ; T. Abe ; H. Tanaka ; H. Hayashi ; K. Miyao ; M. Niwano ; A. Kurosu ; M. Yashiro ; H. Nagano ; N. Matsui ; T. Mimura ; K. Kakizaki ; M. Goto
Pub. info.: Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA.  pp.780-789,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5754
4.

Conference Proceedings
Conference Proceedings
4. Ultra line narrowed injection lock laser light source for higher NA ArF immersion lithography tool
T. Suzuki ; K. Kakizaki ; T. Matsunaga ; S. Tanaka ; Y. Kawasuji ; M. Shimbori ; M. Yoshino ; T. Kumazaki ; H. Umeda ; H. Nagano ; S. Nagai ; Y. Sasaki ; H. Mizoguchi
Pub. info.: Optical microlithography XX.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6520
5.

Conference Proceedings
Conference Proceedings
5. High-power and high-energy stability injection lock laser light source for double exposure or double patterning ArF immersion lithography
M. Yoshino ; H. Nakarai ; T. Ohta ; H. Nagano ; H. Umeda
Pub. info.: Optical Microlithography XXI.  2  pp.69242S-1-69242S-10,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6924