1.

Conference Proceedings

Conference Proceedings
H. Mizoguchi ; T. Inoue ; J. Fujimoto ; T. Yamazaki ; T. Suzuki ; T. Matsunaga ; S. Sakanishi ; M. Kaminishi ; Y. Watanabe ; T. Ohta ; M. Nakane ; M. Moriya ; T. Nakaike ; M. Shinbori ; M. Yoshino ; T. Kawasuji ; H. Nogawa ; T. Ito ; H. Umeda ; S. Tanaka ; H. Taniguchi ; Y. Sasaki ; J. Kinoshita ; T. Abe ; H. Tanaka ; H. Hayashi ; K. Miyao ; M. Niwano ; A. Kurosu ; M. Yashiro ; H. Nagano ; N. Matsui ; T. Mimura ; K. Kakizaki ; M. Goto
Pub. info.: Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA.  pp.780-789,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5754
2.

Technical Paper

Technical Paper
H. Nagano ; A. Ohnishi ; K. Higuchi ; Y. Oikawa ; K. Watanabe ; Y. Nagasaka
Pub. info.: AIAA meeting papers on disc.  2007.  Reston, Va.  American Institute of Aeronautics and Astronautics
Title of ser.: AIAA Paper : Aerospace Sciences Meeting and Exhibit
Ser. no.: 2007
3.

Technical Paper

Technical Paper
Y. Hayakawa ; H. Yoshida ; Y. Okawa ; K. Miyazaki ; S. Kitamura ; H. Nagano
Pub. info.: AIAA meeting papers on disc.  2007.  Reston, Va..  American Institute of Aeronautics and Astronautics
Title of ser.: AIAA Paper : AIAA/ASME/SAE/ASEE Joint Propulsion Conference and Exhibit
Ser. no.: 2007
4.

Technical Paper

Technical Paper
Y. Hayakawa ; H. Yoshida ; Y. Ohkawa ; K. Miyazaki ; S. Kitamura ; H. Nagano
Pub. info.: AIAA meeting papers on disc.  2008.  Reston, Va..  American Institute of Aeronautics and Astronautics
Title of ser.: AIAA Paper : AIAA/ASME/SAE/ASEE Joint Propulsion Conference and Exhibit
Ser. no.: 2008
5.

Technical Paper

Technical Paper
J. Ku ; H. Nagano
Pub. info.: AIAA meeting papers on disc.  2007.  Reston, Va..  American Institute of Aeronautics and Astronautics
Title of ser.: AIAA Paper : International Energy Conversion Engineering Conference and Exhibit (IECEC)
Ser. no.: 2007
6.

Technical Paper

Technical Paper
H. Nagano ; J. Ku
Pub. info.: AIAA meeting papers on disc.  2007.  Reston, Va..  American Institute of Aeronautics and Astronautics
Title of ser.: AIAA Paper : Aerospace Sciences Meeting and Exhibit
Ser. no.: 2007
7.

Technical Paper

Technical Paper
H. Nagano ; J. Ku
Pub. info.: AIAA meeting papers on disc.  2006.  Reston, Va.  American Institute of Aeronautics and Astronautics
Title of ser.: AIAA Paper : AIAA/ASME Joint Thermophysics and Heat Transfer Conference
Ser. no.: 2006
8.

Technical Paper

Technical Paper
J. Ku ; H. Nagano
Pub. info.: AIAA meeting papers on disc.  2006.  Reston, Va.  American Institute of Aeronautics and Astronautics
Title of ser.: AIAA Paper : International Energy Conversion Engineering Conference and Exhibit (IECEC)
Ser. no.: 2006
9.

Conference Proceedings

Conference Proceedings
T. Suzuki ; K. Kakizaki ; T. Matsunaga ; S. Tanaka ; Y. Kawasuji ; M. Shimbori ; M. Yoshino ; T. Kumazaki ; H. Umeda ; H. Nagano ; S. Nagai ; Y. Sasaki ; H. Mizoguchi
Pub. info.: Optical microlithography XX.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6520
10.

Conference Proceedings

Conference Proceedings
M. Yoshino ; H. Nakarai ; T. Ohta ; H. Nagano ; H. Umeda
Pub. info.: Optical Microlithography XXI.  2  pp.69242S-1-69242S-10,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6924