1.

Conference Proceedings
Conference Proceedings
1. Effects of laser bandwidth on iso-dense bias and line end shortening at sub-micron process nodes
R. C. Peng ; A. K. Yang ; L. J. Chen ; Y. W. Guo ; H. H. Liu ; J. Lin ; A. Chang
Pub. info.: Optical microlithography XX.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6520
2.

Conference Proceedings
Conference Proceedings
2. CD control enhancement by laser bandwidth stabilization for advanced lithography application
R. C. Peng ; T. Wu ; K. W. Chang ; C. P. Yeh ; H. H. Liu
Pub. info.: Lithography Asia 2008.  2  pp.714041-1-714041-9,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 7140