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15 results

Conference Proceedings

1. ION BEAM DEPOSITION OF DIAMOND-LIKE COATING

Greenwald, Anton C. ; Hirvonen, James K.. ; Jaggi, Narendra K.

Pub. info.:	Processing and characterization of materials using ion beams : symposium held November 28-December 2, 1988, Boston, Massachusetts, U.S.A.. pp.109-112, 1989. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	128

Conference Proceedings

2. HETEROEPITAXIAL Si-ZrO2-Si BY MOCVD

Greenwald, Anton C. ; Kalkhoran, Nader M. ; Namavar, Fereydoon ; Kaloyeros, Alain E. ; Stathakos, Ioannis

Pub. info.:	Metal-organic chemical vapor deposition of electronic ceramics : Symposium held on November 29-December 3, 1993, Boston, Massachusetts, U.S.A.. pp.123-, 1994. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	335

Conference Proceedings

3. PREPARATION AND EVALUATION OF ERBIUM TRIS(AMIDE) SOURCE COMPOUNDS FOR ERBIUM DOPING OF SEMICONDUCTING MATERIALS

Rees, William S., Jr. ; Lay, Uwe W. ; Greenwald, Anton C.

Pub. info.:	Gas-phase and surface chemistry in electronic materials processing : symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A.. pp.207-, 1994. Pittsburgh, PA. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	334

Conference Proceedings

4. Pulsed electron beam processing of silicon

Greenwald, Anton C. ; Little, Roger G. ; Spitzer, Mark B. ; Wolfson, Robert G.

Pub. info.:	Laser and electron-beam interactions with solids : proceedings of the Materials Research Society Annual Meeting, November 1981, Boston Park Plaza Hotel, Boston, Massachusetts, U.S.A.. pp.621-626, 1982. New York. North Holland
Title of ser.:	Materials Research Society symposia proceedings
Ser. no.:	4

Conference Proceedings

5. Erbium Tris(amide) Compounds as Source Molecules for Rare Earth Doping of Semiconducting Materials

Just, Oliver ; Greenwald, Anton C. ; Rees, William S., Jr.

Pub. info.:	Metal-organic chemical vapor deposition of electronic ceramics II : symposium held on November 27-29 1995, Boston, Massachusetts, U.S.A.. pp.111-, 1996. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	415

Conference Proceedings

6. Tuned infrared emission from lithographically-defined silicon surface structures

Daly, James T. ; Johnson, Edward A. ; Stevenson, William A. ; Greenwald, Anton C. ; Wollam John A. ; George, Thomas ; Jones, Eric W.

Pub. info.:	Infrared applications of semiconductors III : symposium held November 29-December 2, 1999, Boston, Massachusetts, U.S.A.. pp.175-, 2000. Warrendale, Pa.. MRS-Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	607

Conference Proceedings

7. Angular Roll-Off Dependence of Spectral Emission From a Metallodielectric Photonic Crystal

Puscasu, Irina ; Pralle, Martin U. ; McNeal, Mark P. ; Moelders, Nicholas ; Daly, James T. ; Greenwald, Anton C. ; Ludwiszewski, Alan ; Johnson, Edward A. ; Schaich, William L.

Pub. info.:	Engineered porosity for microphotonics and plasmonics : symposium held December 2-4, 2003, Boston, Massachusetts, U.S.A.. pp.237-242, 2004. Warrendale, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	797

Conference Proceedings

8. Thermal Losses and Temperature Measurement in SOI MEMS Heater

Moelders, Nicholas ; Puscasu, Irina ; McNeal, Mark P. ; Pralle, Martin U. ; Last, Lisa ; Ho, William ; Greenwald, Anton C. ; Daly, James T. ; Johnson, Edward A. ; George, Thomas ; Choi, Daniel S.

Pub. info.:	Materials science of microelectromechanical systems (MEMS) devices IV : symposium held November 25-28, 2001, Boston, Massachusetts, U.S.A.. pp.155-160, 2002. Warrendale, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	687

Conference Proceedings

9. Narrow Band Emission From Lithographically Defined Photonic Bandgap Structures In Silicon: Matching Theory And Experiment

Greenwald, Anton C. ; Daly, James T. ; Johnson, Edward A. ; Kinkade, Brian ; McNeal, Mark ; Pralle, Martin ; Moelders, Nicholas ; George, Thomas ; Choi, Daniel S. ; Biswas, Rana ; El-Kady, Ihab

Pub. info.:	Microphotonics--materials, physics and applications : symposium held November 27-29, 2000, Boston, Massachusetts, U.S.A.. 2001. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	637

10.

Conference Proceedings

10. Localized, In Situ, Vacuum Measurements for MEMS Packaging

Moelders, Nicholas ; Daly, James T. ; Greenwald, Anton C. ; Johnson, Edward A. ; McNeal, Mark P. ; Patel, Ramesh ; Pralle, Martin U. ; Puscasu, Irina

Pub. info.:	Micro- and nanosystems : symposium held December 1-3, 2003, Boston, Massachusetts, U.S.A.. pp.211-216, 2004. Warrendale, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	782

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