1.

Conference Proceedings
Conference Proceedings
1. Litmas Plasma Abatement Long-Term Reliability Test
Vartanian, V. ; Beu, L. ; Stephens, T. ; Rivers, J. ; Perez, B. ; Kiehlbauch, M. ; Tonnisand, E. ; Graves, D.
Pub. info.: Environmental issues in the electronics and semiconductor industries : proceedings of the third international symposium.  pp.9-20,  2000.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-7
2.

Conference Proceedings
Conference Proceedings
2. Long-Term Evaluation of a Litmas 'Blue' Inductively-Coupled Plasma Device for Point-of-Use PFC and HFC Abatement
Vartanian, V. ; Beu, L. ; Stephens, T. ; Jewett, R. ; Tonnis, E. ; Graves, D.
Pub. info.: Environmental issues in the electronics and semiconductor industries : proceedings of the second international symposium.  pp.103-115,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-8