1.

Conference Proceedings
Conference Proceedings
1. 157-nm lithography with high numerical aperture lens for 70-nm technology node
Suganaga, T. ; Kanda, N. ; Kim, J.-H. ; Yamabe, O. ; Watanabe, K. ; Furukawa, T. ; Miyoshi, S. ; Itani, T. ; Cashmore, J.S. ; Gower, M.C.
Pub. info.: Optical Microlithography XV.  Part One  pp.584-593,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4691
2.

Conference Proceedings
Conference Proceedings
2. Wavefront aberration measurement in 157-nm high numerical aperture lens
Kim, J.-H. ; Suganaga, T. ; Watanabe, K. ; Kanda, N. ; Itani, T. ; Cashmore, J.S. ; Gower, M.C.
Pub. info.: Optical Microlithography XVI.  Part Three  pp.1408-1419,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5040
3.

Conference Proceedings
Conference Proceedings
3. High-resolution EUV Microstepper tool for resist testing and technology evaluation
Brunton, A. ; Cashmore, J.S. ; Elbourn, P. ; Elliner, G. ; Gower, M.C. ; Grunewald, P. ; Harman, M. ; Hough, S. ; McEntee, N. ; Mundair, S. ; Rees, D. ; Richards, P. ; Truffert, V. ; Wallhead, I. ; Whitfield, M.D.
Pub. info.: High-Power Laser Ablation V.  pp.681-692,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5448
4.

Conference Proceedings
Conference Proceedings
4. High-resolution EUV microstepper tool for resist testing and technology evaluation
Brunton, A. ; Cashmore, J. ; Elbourn, P. ; Elliner, G. ; Gower, M.C. ; Grunewald, P. ; Harman, M. ; Hough, S. ; McEntee, N. ; Mundair, S. ; Rees, D. ; Richards, P. ; Truffert, V. ; Wallhead, I. ; Whitfield, M.
Pub. info.: Emerging Lithographic Technologies VIII.  pp.869-880,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5374
5.

Conference Proceedings
Conference Proceedings
5. New techniques for laser micromachining MEMS devices (Invited Paper)
Abbott, C. ; Allott, R.M. ; Bann, B. ; Boehlen, K.L. ; Gower, M.C. ; Rumsby, P.T. ; Stassen Boehlen, I. ; Sykes, N.
Pub. info.: High-Power Laser Ablation IV.  Part One  pp.281-288,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4760