Tubio, O. ; Esper-Chain, R. ; Gonzalez, F. ; Tobajas, F. ; de Armas, V. ; Montiel, J.A. ; Sarmiento, R.
Pub. info.:
Electronics and structures for MEMS II : 17-19 December 2001, Adelaide, Australia. pp.241-248, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Torek, K. ; Lee, W. ; Palsulich, D. ; Weston, L. ; Gonzalez, F.
Pub. info.:
Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.392-399, 1997. Pennington, NJ. Electrochemical Society
Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.272-279, 1997. Pennington, NJ. Electrochemical Society
Gonzalez, F. ; Tubio, O. ; Tobajas, F. ; de Armas V. ; Esper-Chain, R. ; Sarmiento, R.
Pub. info.:
Electronics and structures for MEMS II : 17-19 December 2001, Adelaide, Australia. pp.91-100, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering