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10 results

Conference Proceedings

1. Construction and testing of wavefront reference sources for interferometry of ultra-precise imaging systems [5869-28]

Johnson, M. A. ; Phillion, D. W. ; Sommargren, G. E. ; Decker, T. A. ; Taylor, J. S. ; Gomei, Y. ; Kakuchi, O. ; Takeuchi, S.

Pub. info.:	Optical manufacturing and testing VI : 31 July-1 August 2005, San Diego, California, USA. pp.58690P-, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5869

Conference Proceedings

2. Calibration of symmetric and non-symmetric errors for interferometry of ultra-precise imaging systems [5869-30]

Phillion, D. W. ; Sommargren, G. E. ; Johnson, M. A. ; Decker, T. A. ; Taylor, J. S. ; Gomei, Y. ; Kakuchi, O. ; Takeuchi, S.

Pub. info.:	Optical manufacturing and testing VI : 31 July-1 August 2005, San Diego, California, USA. pp.58690R-, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5869

Conference Proceedings

3. Development of EUV point diffraction interferometry using the NewSUBARU undulator radiation

Niibe, M. ; Mukai, M. ; Tanaka, T. ; Sugisaki, K. ; Zhu, Y. ; Gomei, Y.

Pub. info.:	X-ray mirrors, crystals, and multilayers II : 10-11 July 2002, Seattle, Washington, USA. pp.204-211, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4782

Conference Proceedings

4. Preliminary study on systematic optimization of EPL mask infrastructure

Takase, H. ; Gomei, Y. ; Terashima, S. ; Kondo, H. ; Aoki, T. ; Matsunari, S. ; Niibe, M. ; Kakutani, Y.

Pub. info.:	Emerging lithographic technologies IX : 1-3 March 2005, San Jose, California, USA. pp.509-517, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5751

Conference Proceedings

5. EPL performance in 65-nm node metallization technology and beyond

Kakutani, Y. ; Niibe, M. ; Takase, H. ; Terashima, S. ; Kondo, H. ; Matsunari, S. ; Aoki, T. ; Gomei, Y. ; Fukuda, Y.

Pub. info.:	Emerging lithographic technologies IX : 1-3 March 2005, San Jose, California, USA. pp.501-508, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5751

Conference Proceedings

6. Debris characterization and mitigation from microscopic laser-plasma tin-doped droplet EUV sources

Aoki, T. ; Kondo, H. ; Matsunari, S. ; Takase, H. ; Gomei, Y. ; Terashima, S.

Pub. info.:	Emerging lithographic technologies IX : 1-3 March 2005, San Jose, California, USA. pp.563-571, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5751

Conference Proceedings

7. A reflectance measurement system for investigating radiation damage to EUVL mirrors in NewSUBARU

Kakutani, Y. ; Niibe, M. ; Kakiuchi, K. ; Takase, H. ; Terashima, S. ; Kondo, H. ; Matsunari, S. ; Aoki, T. ; Gomei, Y. ; Fukuda, Y.

Pub. info.:	Advances in mirror technology for X-ray, EUV lithography, laser, and other applications II : 5 August 2004, Denver, Colorado, USA. pp.47-57, 2004. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5533

Conference Proceedings

8. Visible light point-diffraction interferometer for testing of EUVl optics [6151-14]

Takeuchi, S. ; Kakuchi, O. ; Yamazoe, K. ; Gomei, Y. ; Decker, T. A. ; Johnson, M. A. ; Phillion, D. W. ; Taylor, J. S.

Pub. info.:	Emerging Lithographic Technologies X. pp.61510E-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6151

Conference Proceedings

9. Effect ofresidual gas atmosphere on lifetime of Ru-capped EUVl projection optics mirror [6151-17]

Kakutani, Y ; Nilbe, M. ; Gomei, Y. ; Talase, H. ; Terashima, S. ; Matsunari, S. ; Aoki, T. ; Murakami, K ; Fukuda, Y

Pub. info.:	Emerging Lithographic Technologies X. pp.61510H-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6151

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Conference Proceedings

10. ASET development of at-wavelength phase-shifting point diffraction interferometer

Sugisaki, K. ; Zhu, Y. ; Gomei, Y. ; Niibe, M.

Pub. info.:	Emerging Lithographic Technologies VI. Part Two pp.695-701, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4688

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Author: Gomei, Y.