1.

Conference Proceedings
Conference Proceedings
1. Recent advances in the Sandia EUV 10x microstepper (Invited Paper)
Goldsmith,J.E.M. ; Wronosky,J.B. ; Barr,P.K. ; Berger,K.W. ; Bernardez II,L.J. ; Cardinale,G.F. ; Darnold,J.R. ; Folk,D.R. ; Haney,S.J. ; Henderson,C.C. ; Jefferson,K.L. ; Krenz,K.D. ; Kubiak,G.D. ; Nissen,R.P. ; O'Connell,D.J. ; Perras,Y.E. ; Ray-Chaudhuri,A.K. ; Smith,T.G. ; Stulen,R.H. ; Tichenor,D.A. ; Ver Berkmoes,A.A.
Pub. info.: Emerging lithographic technologies II : 23-25 February 1998, Santa Clara, California.  pp.11-19,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3331
2.

Conference Proceedings
Conference Proceedings
2. Top-surface imaging resists for EUV lithography (Invited Paper)
Henderson,C.C. ; Wheeler,D.P. ; Pollagi,T.P. ; O'Connell,D.J. ; Goldsmith,J.E.M. ; Fisher,A. ; Cardinale,G.F. ; Hutchinson,J.M. ; Rao,V.
Pub. info.: Emerging lithographic technologies II : 23-25 February 1998, Santa Clara, California.  pp.32-40,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3331
3.

Conference Proceedings
Conference Proceedings
3. Comparison of at-wavelength inspection,printability,and simulation of nanometer-scale substrate defects in extreme ultraviolet lithography(EUVL)
Cardinale,G.F. ; Goldsmith,J.E.M. ; Ray-Chaudhuri,A.K. ; Fisher,A. ; Hector,S.D. ; Mangat,P.J.S. ; Masnyj,Z.S. ; Mancini,D.P. ; Wilkinson,B. ; Bokor,J. ; Jeong,S. ; Burkhart,S.C. ; Cerjan,C.J. ; Walton,C.C. ; Yan,P. ; Zhang,C.
Pub. info.: 19th Annual Symposium on Photomask Technology : 15-17 September 1999, Monterey, California.  Part1  pp.429-439,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3873
4.

Conference Proceedings
Conference Proceedings
4. Direct comparison of EUV and visible-light interferometries
Goldberg,K.A. ; Naulleau,P. ; Lee,S.H. ; Chang,C. ; Bresloff,C.J. ; Gaughan,R.J. ; Chapman,H.N. ; Goldsmith,J.E.M. ; Bokor,J.
Pub. info.: Emerging lithographic technologies III : 15-17 March 1999, Santa Clara, California.  Part2  pp.635-642,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3676
5.

Conference Proceedings
Conference Proceedings
5. EUV scattering and flare of 10X projection cameras
Gullikson,E.M. ; Baker,S.L. ; Bjorkholm,J.E. ; Bokor,J. ; Coldberg,K.A. ; Goldsmith,J.E.M. ; Montcalm,C. ; Naulleau,P. ; Spiller,E.A. ; Stearns,D.G. ; Taylor,J.S. ; Underwood,J.H.
Pub. info.: Emerging lithographic technologies III : 15-17 March 1999, Santa Clara, California.  Part2  pp.717-723,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3676
6.

Conference Proceedings
Conference Proceedings
6. Development of an electric capillary discharge source
Fornaciari,N.R. ; Chang,J.J. ; Folk,D.R. ; Gianoulakis,S.E. ; Goldsmith,J.E.M. ; Kubiak,G.D. ; Long,B.C. ; O'Connell,D.J. ; Shimkaveg,G.M. ; Silfvast,W.T. ; Stewartka,K.D.
Pub. info.: Emerging lithographic technologies IV : 28 February-1 March 2000, Santa Clara, USA.  pp.120-125,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3997