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15 results

Conference Proceedings

1. MOLECULAR DYNAMICS STUDIES OF IMPURITY SEGREGATION AND TRAPPING

Gilmer, G. H. ; Roland, Christopher ; Karunasiri, R. P. U.

Pub. info.:	Interface dynamics and growth : symposium held December 2-6, 1991, Boston, Massachusetts, U.S.A.. pp.223-228, 1992. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	237

Conference Proceedings

2. Atomistic Model of Transient-Enhanced Diffusion and Clustering of Boron in Silicon

Pelaz, L. ; Gilmer, G. H. ; Jaraiz, M. ; Gossmann, H-J. ; Rafferty, C. S. ; Eaglesham, D. J. ; Poate, J. M.

Pub. info.:	Defects and diffusion in silicon processing : symposium held April 1-4, 1997, San Francisco, California, U.S.A.. pp.341-, 1997. Pittsburg, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	469

Conference Proceedings

3. The influence of clusters on vapor-deposited thin films: Atomistic simulations

Torre, J. Dalla ; Gilmer, G. H. ; Baumann, F. H. ; Sullivan, P. O. ; Rouhani, M. Djafari

Pub. info.:	New methods, mechanisms and models of vapor deposition : symposium held April 24-26, 2000, San Francisco, California, U.S.A.. pp.129-, 2000. Warrendale, PA. MRS-Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	616

Conference Proceedings

4. Simulators of Thin Film Deposition for Silicon Device Processing

Gilmer, G. H. ; Baumann, F. H. ; Rubia, T. Diaz de la

Pub. info.:	Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A.. pp.119-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	514

Conference Proceedings

5. Simulations of Si(100) Growth: Step Flow and Low Temperature Growth

Roland, C. ; Zhang, Q. M. ; Boguslawski, P. ; Bernholc, J. ; Gilmer, G. H.

Pub. info.:	Evolution of epitaxial structure and morphology : symposium held November 27-December 1, 1995, Boston, Massachusetts, U.S.A.. pp.511-, 1996. Pittsburgh, Pennsylvania. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	399

Conference Proceedings

6. Growth and Structure of Metallic Barrier Layer and Interconnect Films I: Experiments

Windt, D. L. ; Torre, J. Dalla ; Gilmer, G. H. ; Sapjeta, J. ; Kalyanaraman, R. ; Baumann, F. H. ; O'Sullivan, P. L. ; Dunn, D. ; Hull, R.

Pub. info.:	Advanced interconnects and contacts : symposium held April 5-7, 1999, San Francisco, California, U.S.A.. pp.307-, 1999. Warrendale, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	564

Conference Proceedings

7. Interstitial Defect Reactions in Silicon

Zhao, S. ; Agarwal, A. M. ; Benton, J. L. ; Gilmer, G. H. ; Kimerling, L. C.

Pub. info.:	Defects in electronic materials II : symposium held December 2-6, 1996, Boston, Massachusetts, U.S.A.. pp.231-, 1997. Pittsburgh, Penn. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	442

Conference Proceedings

8. Numerical Simulations of Topographic Evolution for Sputter Deposition into Trenches and Vias

O'Sullivan, P. L. ; Baumann, F. H. ; Gilmer, G. H.

Pub. info.:	Advanced interconnects and contacts : symposium held April 5-7, 1999, San Francisco, California, U.S.A.. pp.313-, 1999. Warrendale, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	564

Conference Proceedings

9. Atomic Scale Simulations of Arsenic Ion Implantation and Annealing in Silicon

Caturla, M. -J. ; Rubia, T. Diaz de la ; Jaraiz, M. ; Gilmer, G. H.

Pub. info.:	Ion-solid interactions for materials modification and processing : symposium held November 27-December 1, 1995, Boston, Massachusetts, U.S.A.. pp.45-, 1996. Pittsburgh. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	396

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Conference Proceedings

10. POINT DEFECT PRODUCTION, GEOMETRY AND STABILITY IN SILICON: A MOLECULAR DYNAMICS SIMULATION STUDY

Caturla, M.-J. ; Rubia, T. Diaz de la ; Gilmer, G. H.

Pub. info.:	Materials synthesis and processing using ion beams : symposium held November 29-December 3, 1993, Boston, Massachusetts, U.S.A.. pp.141-, 1994. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	316

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Author: Gilmer, G. H.