1.

Conference Proceedings
Conference Proceedings
1. CHARACTERIZATION OF POLYSILICON FILMS BY RAMAN SPECTROSCOPY AND TRANSMISSION ELECTRON MICROSCOPY: A COMPARATIVE STUDY
Tallant, David R. ; Headley, Thomas J. ; Medernach, John W. ; Geyling, Franz
Pub. info.: Diagnostic techniques for semiconductor materials processing : Symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A..  pp.255-,  1994.  Pittsburgh.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 324
2.

Conference Proceedings
Conference Proceedings
2. Commercial RTP-A SEMATECH Perspective
Speranza, Tony ; Riley, Terry ; Nanda, Arun ; Fowler, Burt ; Torres, Kenneth ; Geyling, Franz ; Lindholm, Don
Pub. info.: Rapid thermal and integrated processing V : symposium held April 8-12, 1996, San Francisco, California, U.S.A..  pp.309-,  1996.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 429