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11 results

Conference Proceedings

1. High-resolution pyroelectric linear arrays based on LiTaO3

Norkus,V. ; Gerlach,G. ; Hofmann,G.

Pub. info.:	Infrared technology and applications XXVII : 16-20 April 2001, Orlando, USA. pp.322-331, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4369

Conference Proceedings

2. Finite element modeling of the thermo-electro-mechanical coupling in pyroelectric infrared sensor arrays

Drescher,J. ; Balke,H. ; Bahr,H.-A. ; Milde,G. ; Gerlach,G.

Pub. info.:	MOEMS and Miniaturized systems II : 22-24 October 2001, San Francisco, USA. pp.333-338, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4561

Conference Proceedings

3. Calculating the modulation transfer function of a pyroelectric infrared sensor array

Milde,G. ; Gerlach,G. ; Drescher,J. ; Balke,H.

Pub. info.:	MOEMS and Miniaturized systems II : 22-24 October 2001, San Francisco, USA. pp.323-332, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4561

Conference Proceedings

4. Process technologies for high-resolution infrared detectors based on LiTaO3

Norkus,V. ; Gerlach,G. ; Hofmann,G.

Pub. info.:	Device and process technologies for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia. pp.233-240, 1999. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3892

Conference Proceedings

5. Pyroelectric infrared arrays and their applications

Norkus,V. ; Sokoll,T. ; Gerlach,G. ; Hofmann,G.

Pub. info.:	Infrared spaceborne remote sensing V : 30 July-1 August 1997, San Diego, California. pp.409-419, 1997. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3122

Conference Proceedings

6. Microporous layer for selective detection of VOCs in gases and liquids

Belge,G. ; Nopper,D. ; Herold,M. ; Gauglitz,G. ; Buchold,R. ; Gerlach,G.

Pub. info.:	Advanced environmental and chemical sensing technology : 5-8 November 2000, Boston, USA. pp.84-92, 2000. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4205

Conference Proceedings

7. Hot filament infrared radiators and pyroelectric single-element detectors for analytical application

Norkus,V. ; Sokoll,T. ; Gerlach,G. ; Bayerlein,D. ; Enenkel,M. ; Winkler,M.

Pub. info.:	Infrared technology and applications XXVI : 30 July - 3 August 2000, San Diego, USA. pp.808-815, 2000. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4130

Conference Proceedings

8. Transient measurement of surface deflection for beams and membranes in micromechanical devices

Klein,A. ; Schroth,A. ; Gerlach,G. ; Maeda,R.

Pub. info.:	Third International Conference on Vibration Measurements by Laser Techniques: Advances and Applications, 16-19 June, 1998, Ancona, Italy. pp.618-623, 1998. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3411

Conference Proceedings

9. Simulation of fluid-structure interaction in micropumps by coupling of two commercial finite element programs

Klein,A. ; Gerlach,G.

Pub. info.:	Microfluidic Devices and Systems. pp.194-204, 1998. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3515

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Conference Proceedings

10. Piezoresistive effect: stable enough for high-accuracy sensor applications?

Gerlach,G. ; Nakiadal,A. ; Buchhold,R. ; Baumann,K.

Pub. info.:	Micromachined Devices and Components IV. pp.377-385, 1998. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3514

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