1.

Conference Proceedings
Conference Proceedings
1. Multibeam resolution die-to database reticle inspection
Volk, W.W. ; Broadbent, W.H. ; Garcia, H.I. ; Waston, S.G. ; Lim, P.M. ; Ruch, W.E.
Pub. info.: 18th European Conference on Mask Technology for Integrated Circuits and Microcomponents.  pp.182-192,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4764
2.

Conference Proceedings
Conference Proceedings
2. Extending TeraStar reticle inspection capability to the 90nm node through layer-specific algorithms
Rudzinski, M.W. ; Garcia, H.I. ; Volk, W.W. ; Wang, L.
Pub. info.: 19th European Conference on Mask Technology for Integrated Circuits and Microcomponents.  pp.98-106,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5148
3.

Conference Proceedings
Conference Proceedings
3. New die-to-database inspection algorithm for inspection of 90-nm node reticles
Garcia, H.I. ; Volk, W.W. ; Watson, S. ; Hess, C. ; Aquino, C. ; Wiley, J. ; Mack, C.A.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology X.  pp.364-374,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5130
4.

Conference Proceedings
Conference Proceedings
4. Energy flux method for inspection of contact and VIA layer reticles
Garcia, H.I. ; Volk, W.W. ; Xiong, Y. ; Watson, S.G. ; Yu, Z. ; Guo, Z. ; Wang, L.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVII.  1  pp.81-92,  2003.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5038
5.

Conference Proceedings
Conference Proceedings
5. Energy flux method for die-to-database inspection of critical layer reticles
Garcia, H.I. ; Volk, W.W. ; Xiong, Y. ; Watson, S.G. ; Yu, Z. ; Guo, Z. ; Wang, L.
Pub. info.: 22nd Annual BACUS Symposium on Photomask Technology.  Part Two  pp.935-946,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4889
6.

Conference Proceedings
Conference Proceedings
6. New energy flux method for inspection of contact layer reticles
Volk, W.W. ; Garcia, H.I. ; Becker, C. ; Chen, G. ; Watson, S.G.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology IX.  pp.499-510,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4754