1.

Conference Proceedings
Conference Proceedings
1. Thick SOI films by rapid thermal processing for high voltage integrated circuits
Dilhac, J.M. ; Cornibert, L. ; Charitat, G. ; Noihier, N. ; Zerrouk, D. ; Ganibal, C.
Pub. info.: Proceedings of the Eighth International Symposium on Silicon-on-Insulator Technology and Devices.  pp.245-250,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-23
2.

Conference Proceedings
Conference Proceedings
2. Temperature Gradient Rapid Thermal Processor
Dilhac, J.-M. ; Ganibal, C.
Pub. info.: Rapid thermal and other short-time processing technologies : proceedings of the international symposium.  pp.421-428,  2000.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-9
3.

Conference Proceedings
Conference Proceedings
3. Realization of Deep p+ Zones by Al Thermomigration in a Temperature Gradient RTP Furnace
Morillon, B. ; Dilhac, J-M. ; Ganibal, C. ; Anceau, C.
Pub. info.: Rapid thermal and other short-time processing technologies II : proceedings of the international symposium.  pp.393-400,  2001.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-9
4.

Conference Proceedings
Conference Proceedings
4. SILICON TEMPERATURE AND THERMAL GRADIENTS MEASUREMENTS IN A RAPID THERMAL PROCESSOR OPERATING AT ATMOSPHERIC PRESSURE OR IN VACUUM
Dilhac, J-M. ; Ganibal, C. ; Maritnez, A.
Pub. info.: Rapid thermal processing of electronic materials : symposium held April 21-23, 1987, Anaheim California, U.S.A..  pp.259-264,  1987.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 92
5.

Conference Proceedings
Conference Proceedings
5. IN SITU WAFER EMISSIVITY VARIATION MEASUREMENT IN A RAPID THERMAL PROCESSOR
Dilhac, J-M. ; Ganibal, C. ; Nolhier, N.
Pub. info.: Rapid thermal and integrated processing : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A..  pp.3-8,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 224
6.

Conference Proceedings
Conference Proceedings
6. Deep Diffusions and SOI Layers Produced by Rapid Thermal Processing for Smart Power Applications
Dilhac, J-M. ; Cornibert, L. ; Ganibal, C.
Pub. info.: Rapid thermal and integrated processing VI : symposium held April 1-4, 1997, San Francisco, California, U.S.A..  pp.319-,  1997.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 470
7.

Conference Proceedings
Conference Proceedings
7. Large silicon micromirror modeling and fabrication
Marchese, A. ; Camon, H. ; Ganibal, C.
Pub. info.: MEMS/MOEMS Components and Their Applications II.  pp.108-116,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5717