1.

Conference Proceedings
Conference Proceedings
1. A 60 GHz microwave resonance investigation of shallowly formed InAs quantum dots embedded in GaAs
N. Zurauskiene ; G. Janssen ; E. Goovaerts ; M. Godlewski ; V. Y. Ivanov ; P. M. Koenraad
Pub. info.: Advanced optical materials, technologies, and devices : 27-30 August 2006, Vilnius, Lithuania.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6596
2.

Conference Proceedings
Conference Proceedings
2. Metrology challenges for advanced lithography techniques
I. Englard ; P. Vanoppen ; J. Finders ; I. Minnaert-Janssen ; F. Duray ; J. Meessen ; G. Janssen ; O. Adan ; L. Gershtein ; R. Peltinov ; C. Masia ; R. Piech
Pub. info.: Metrology, inspection, and process control for microlithography XXI.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6518
3.

Conference Proceedings
Conference Proceedings
3. MacroCD contact ellipticity measurement for lithography tool qualification
I. Englard ; E. van Setten ; G. Janssen ; P. Vanoppen ; I. Minnaert-Janssen ; F. Duray ; O. Adan ; A. Moran ; L. Gershtein ; R. Peltinov
Pub. info.: Metrology, inspection, and process control for microlithography XXI.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6518