1.

Conference Proceedings
Conference Proceedings
1. 0.3-ｦﾌm pitch random interconnect patterning with node connection phase-shifting mask:experiments and simulations
Fukuda,H. ; Hotta,S.
Pub. info.: Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA.  Part1  pp.149-159,  2000.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4000
2.

Conference Proceedings
Conference Proceedings
2. Quasi-physical model for fast resist contour simulation: importance of lens aberrations and acid diffusion in LSI pattern design
Fukuda,H. ; Hattori,K.T.
Pub. info.: Optical microlithography XI : 25-27 February 1998, Santa Clara, California.  pp.154-163,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3334
3.

Conference Proceedings
Conference Proceedings
3. ALA-based photodynamic therapy in epithelial tumors:in-vivo and in-vitro models
Casas,A. ; Fukuda,H. ; Batlle,A.
Pub. info.: Optical methods for tumor treatment and detection : mechanisms and techniques in photodynamic therapy IX : 22-23 January 2000, San Jose, California.  pp.114-123,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3909
4.

Conference Proceedings
Conference Proceedings
4. Precise CD control of 140-nm gate patterns using phase-edge PSM
Hotta,S. ; Inoue,O. ; Fukuda,H. ; Hasegawa,N.
Pub. info.: Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA.  Part2  pp.1360-1370,  2000.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4000
5.

Conference Proceedings
Conference Proceedings
5. Lens aberration measurement technique using attentuated phase-shifting mask
Imai,A. ; Hayano,K. ; Fukuda,H. ; Asai,N. ; Hasegawa,N.
Pub. info.: Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA.  Part2  pp.1260-1268,  2000.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4000
6.

Conference Proceedings
Conference Proceedings
6. Scavengers modifying the phototoxicity induced by ALA-mediated photodynamic therapy
Casas,A. ; Perotti,C. ; Fukuda,H. ; Batlle,A.
Pub. info.: Optical methods for tumor treatment and detection : mechanisms and techniques in photodynamic therapy X : 20-21 January 2001, San Jose, USA.  pp.179-188,  2001.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4248
7.

Conference Proceedings
Conference Proceedings
7. Patterning of random interconnect using double exposure of strong-type PSMs
Fukuda,H. ; Hagiwara,T.
Pub. info.: Optical Microlithography XIV.  4346  pp.695-702,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4346
8.

Conference Proceedings
Conference Proceedings
8. Impact of acid/quencher behavior on lithography performance
Fukuda,H. ; Hattori,K.T. ; Hagiwara,T.
Pub. info.: Optical Microlithography XIV.  4346  pp.319-330,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4346
9.

Conference Proceedings
Conference Proceedings
9. Effects of radially nonsymmetric pupil filters and multiple-pupil exposure
Bunau,R.M.von ; Fukuda,H. ; Terasawa,T.
Pub. info.: Optical Microlithography IX.  Part1  pp.375-385,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2726