1.

Conference Proceedings
Conference Proceedings
1. Characterization of Oxide Etching and Wafer Cleaning Using Vapor-Phase Anhydrous HF and Ozone
Froeschle, Barbara ; Deutschmann, Lutz ; Bauer, Anton J. ; Burte, Edmund P.
Pub. info.: Rapid thermal and integrated processing VI : symposium held April 1-4, 1997, San Francisco, California, U.S.A..  pp.237-,  1997.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 470
2.

Conference Proceedings
Conference Proceedings
2. Cleaning Process Optimization in a Gate Oxide Cluster Tool Using an In-Line XPS Module
Froeschle, Barbara ; Glowacki, Frederique ; Bauer, Anton J. ; Kasko, Igor ; Oechsner, Richard ; Schneider, Claus
Pub. info.: Science and technology of semiconductor surface preparation : symposium held April 1-3, 1997, San Francisco, California, U.S.A..  pp.371-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 477