Popov, E. ; Hoose, J. ; Frankel, R. ; Keast, C. ; Fritze, M. ; Fan, T. Y. ; Yost, D. ; Rabe, S.
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Physics, theory, and applications of periodic structures in optics II : 5-7 August 2003, San Diego, California, USA. pp.82-88, 2003. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Tyrrell, B. ; Fritze, M. ; Mallen, R.D. ; Wheeler, B. ; Rhyins, P.D. ; Martin, P.M.
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Design, process integration, and characterization for microelectronics : 6-7 March 2002, Santa Clara, USA. pp.503-516, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Fritze, M. ; Tyrrell, B. ; Fedynyshyn, T. ; Rothschild, M. ; Brooker, P.
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Emerging lithographic technologies IX : 1-3 March 2005, San Jose, California, USA. pp.483-490, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Design and process integration for microelectronic manufacturing II [sic] : 26-27 February 2004, Santa Clara, California, USA. pp.30-38, 2004. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Fritze, M. ; Tyrrell, B. ; Mallen, R.D. ; Wheeler, B. ; Rhyins, P.D. ; Martin, P.M.
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Design and process integration for microelectronic manufacturing II : 26-28 February 2003, Santa Clara, California, USA. pp.15-29, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Fritze, M. ; Tyrrell, B. ; Cann, S.G. ; Carney, C. ; Blachowicz, B.A. ; Brzozowy, D. ; Kocab, T. ; Bowdoin, S. ; Rhyins, P.D. ; Progler, C.J. ; Martin, P.
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Optical Microlithography XV. Part One pp.426-436, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering