Proceedings of the third Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films. pp.13-22, 1994. Pennington, NJ. Electrochemical Society
Watkins, G.D. ; Fowler, W.B. ; Deleo, G.G. ; Stavola, M. ; Kozuch, D.M. ; Pearton, S.J. ; Lopata, J.
Pub. info.:
Impurities, defects, and diffusion in semiconductors : bulk and layered structures : symposium held November 27-December 1, 1989, Boston, Massachusetts, U.S.A.. pp.367-376, 1990. Pittsburgh, Pa.. Materials Research Society