1.

Conference Proceedings
Conference Proceedings
1. Development of a high-average-power extreme-ultraviolet electric capillary discharge source
Fornaciari,N.R. ; Bender,H. ; Buchenauer,D. ; Kanouff,M.P. ; Karim,S. ; Kubiak,G.D. ; Moen,C.D. ; Shimkaveg,G.M. ; Silfvast,W.T. ; Stewart,K.D.
Pub. info.: Emerging lithographic technologies V : 27 February-1 March, 2001, Santa Clara, [California], USA.  pp.226-231,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4343
2.

Conference Proceedings
Conference Proceedings
2. Development of an electric capillary discharge source
Fornaciari,N.R. ; Chang,J.J. ; Folk,D.R. ; Gianoulakis,S.E. ; Goldsmith,J.E.M. ; Kubiak,G.D. ; Long,B.C. ; O'Connell,D.J. ; Shimkaveg,G.M. ; Silfvast,W.T. ; Stewartka,K.D.
Pub. info.: Emerging lithographic technologies IV : 28 February-1 March 2000, Santa Clara, USA.  pp.120-125,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3997