1.

Conference Proceedings
Conference Proceedings
1. INTRODUCTORY REMARKS - ITRS UPDATE AND GLOBAL CONSORTIA
Huff, H.R. ; Fabry, L. ; Kishino, S.
Pub. info.: Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology.  pp.3-4,  2002.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-2
2.

Conference Proceedings
Conference Proceedings
2. INVITED: GETTERING EFFICIENCIES AND THEIR DEPENDENCE ON MATERIAL PARAMETERS AND THERMAL PROCESS: HOW CAN THIS BE MODELED?
HoeIzl, R. ; Blietz, M. ; Fabry, L. ; Schmolke, R.
Pub. info.: Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology.  pp.608-625,  2002.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-2
3.

Conference Proceedings
Conference Proceedings
3. Optimization of ultra-trace analysis in silicon wafer manufacturing using Taguchi-methods
Fabry, L. ; Pahlke, S. ; Kotz, L. ; Ruefer, H. ; Ehmann, T. ; Baechmann, K.
Pub. info.: Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II.  pp.468-483,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-22
4.

Conference Proceedings
Conference Proceedings
4. QUALITY ASPECTS OF CHEMICAL ETCHING OF SILICON
Bauer, Th. ; Fabry, L. ; Teuschler, T. ; Schwab, G. ; Stadler, M.
Pub. info.: Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology.  pp.619-628,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-1(1)
5.

Conference Proceedings
Conference Proceedings
5. Laser diode atomic absorption spectroscopy (LAAS) - A new method for ultra trace elemental analysis
Schnuerer-Patschan, C. ; Hrosch, W. ; Pahlke, S. ; Kotz, L. ; Fabry, L.
Pub. info.: Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II.  pp.496-502,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-22
6.

Conference Proceedings
Conference Proceedings
6. Application of TXRF in silicon wafer manufacturing
Fabry, L. ; Pahlke, S. ; Kotz, L.
Pub. info.: ALTECH 95 : analytical techniques for semiconductor materials and process characterization II : proceedings of the Satellite Symposium to ESSDERC 95, The Hague, The Netherlands.  pp.217-227,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-30
7.

Conference Proceedings
Conference Proceedings
7. CONTAMINATION MONITORING AND ANALYSIS METHODS IN LARGE SCALE Si-MANUFACTURING
Fabry, L. ; Koester, L. ; Pahlke, S. ; Kotz, L. ; Hage, J.
Pub. info.: Proceedings of the Satellite Symposium to ESSDERC 93 Grenoble/France : crystalline defects and contamination: their impact and control in device manufacturing.  pp.193-221,  1993.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1993-15
8.

Conference Proceedings
Conference Proceedings
8. INTRODUCTORY REMARKS: 'GEAR OF CHALLENGE': SMART AND AFFORDABLE DIAGNOSTICS
Fabry, L. ; Matsushita, Y.
Pub. info.: Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology.  pp.1459-1465,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-1(2)
9.

Conference Proceedings
Conference Proceedings
9. Re-Dissolving VPD-TXRF-Droplets of 300 mm Wafer for the Determination of Inorganic Anions by Capillary Electrophoresis
Fabry, L. ; Ehmann, Th. ; Pahlke, S. ; Kotz, L.
Pub. info.: Proceedings of the Fifth International Symposium on High Purity Silicon V.  pp.373-378,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-13
10.

Conference Proceedings
Conference Proceedings
10. TXRF IN THE DAILY ROUTINE
Fabry, L. ; Pahlke, S. ; Kotz, L. ; Schemmel, E.
Pub. info.: Proceedings of the Satellite Symposium to ESSDERC 93 Grenoble/France : crystalline defects and contamination: their impact and control in device manufacturing.  pp.232-239,  1993.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1993-15