1.

Conference Proceedings
Conference Proceedings
1. New approach for defect inspection on large area masks
G. Scheuring ; S. Doebereiner ; F. Hillmann ; G. Falk ; H. Brueck
Pub. info.: EMLC 2007 : 23rd european mask and lithography conference : 22-25 January 2007, Grenoble, France.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6533
2.

Conference Proceedings
Conference Proceedings
2. New results from DUV water immersion microscopy using the CD metrology system LWM500 WI with a high NA condenser
F. Hillmann ; G. Scheuring ; H.-J. Brück
Pub. info.: EMLC 2008 : 24th European Mask and Lithography Conference : 21-24 January 2008, Dresden, Germany.  pp.679215-1-679215-6,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6792