1.

Conference Proceedings
Conference Proceedings
1. Characterization of PECVD-Deposited Fluorosilicate Glass (FSG) After CMP and Cleaning
Mordo, D. ; Goswami, I. ; Malik, I. J. ; Mallon, T. ; Emami, R. ; Withers, B.
Pub. info.: Low-dielectric constant materials II : symposium held December 2-3, 1996, Boston, Massachusetts, U.S.A..  pp.127-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 443
2.

Conference Proceedings
Conference Proceedings
2. Chemical Mechanical Cleaning for Post-CMP Applications: Defects and Metals Results
Zhao, E. Y. ; Emami, R. ; Malik, I. ; Mishra, K. ; Krusell, W. C. ; Larios, J. de ; Hymes, D. J.
Pub. info.: Science and technology of semiconductor surface preparation : symposium held April 1-3, 1997, San Francisco, California, U.S.A..  pp.137-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 477