1.

Conference Proceedings
Conference Proceedings
1. Influence of γ-radiation on short channel SOI-MOSFETs with thin SiO2films
Claeys, C. ; Simoen, E. ; Litovchenko, V.G. ; Evtukh, A. ; Efremov, A. ; Kizjak, A. ; Rassamakin, Ju.
Pub. info.: Progress in SOI structures and devices operating at extreme conditions.  pp.211-220,  2002.  Dordrecht.  Kluwer Academic Publishers
Title of ser.: NATO science series. Series 2, Mathematics, physics and chemistry
Ser. no.: 58
2.

Conference Proceedings
Conference Proceedings
2. Etching mechanism of Au thin films in Cl2/Ar inductively coupled plasma
Efremov, A. ; Svettsov, V. ; Kim, C.-I.
Pub. info.: Micro- and Nanoelectronics 2003.  pp.72-78,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5401
3.

Conference Proceedings
Conference Proceedings
3. Volume and heterogeneous chemistry in Cl2/Ar inductively coupled plasma
Efremov, A. ; Svettsov, V. ; Kim, C.-I.
Pub. info.: Micro- and Nanoelectronics 2003.  pp.64-71,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5401