1.

Conference Proceedings
Conference Proceedings
1. Adaptive on-line estimation and control of overlay tool bias
Martinez, V.M. ; Finn, K. ; Edgar, T.F.
Pub. info.: Advanced process control and automation : 27 February, 2003, Santa Clara, California, USA.  pp.52-62,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5044
2.

Conference Proceedings
Conference Proceedings
2. Modeling of Plasma Etch Dynamics Using Linear and Nonlinear Models
Bushman, S. ; Karijala, T.W. ; Himmelblau, D.M. ; Trachtenberg, I. ; Edgar, T.F.
Pub. info.: Proceedings of the Symposium on Process control, Diagnostics, and Modeling in Semiconductor Manufacturing.  pp.218-234,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-2
3.

Conference Proceedings
Conference Proceedings
3. Model-Based Control of Rapid Thermal Processes
Stuber, J.D. ; Edgar, T.F. ; Brecdijk, T.
Pub. info.: Proceedings of the Symposium on Process control, Diagnostics, and Modeling in Semiconductor Manufacturing.  pp.113-147,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-2
4.

Conference Proceedings
Conference Proceedings
4. MODELING OF THE SILANE SURFACE REACTION INT THE CHEMICAL VAPOR DEPOSITION OF POLYSILICON IN A COLD WALL RAPID THERMAL SYSTEM
Toprac, A.J. ; Trachtenberg, I. ; Edgar, T.F.
Pub. info.: Proceedings of the Third International Symposium on Process Physics and Modeling in Semiconductor Technology.  pp.337-349,  1993.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1993-6
5.

Conference Proceedings
Conference Proceedings
5. Kinetic Model Reduction in Plasma Reaction Networks
Edwards, K. ; Edgar, T.F. ; Manousiouthakis, V.
Pub. info.: AIChE 1993 ANNUAL MEETING - ST. LOUIS, MO - NOV. 7-12, 1993.  1993.  New York.  American Institute of Chemical Engineers
Title of ser.: AIChE meeting [papers]
Ser. no.: 1993
6.

Conference Proceedings
Conference Proceedings
6. Building Qualitative Models of Dynamic Chemical Systems
Molle, D.T. Dalle ; Edgar, T.F.
Pub. info.: AIChE SPRING NATIONAL MEETING -ORLANDO, FL- MARCH 18-22, 1990.  1990.  New York.  American Institute of Chemical Engineers
Title of ser.: AIChE meeting [papers]
Ser. no.: 1990
7.

Conference Proceedings
Conference Proceedings
7. Qualitative Modling of Dynamic Systems
Molle, D.T. Dalle ; Edgar, T.F.
Pub. info.: AIChE ANNUAL MEETING, NEW YORK, NY - NOVEMBER 15-20, 1987.  1987.  New York.  American Institute of Chemical Engineers
Title of ser.: AIChE meeting [papers]
Ser. no.: 1987
8.

Conference Proceedings
Conference Proceedings
8. MULTIVARIABLE ADAPTIVE CONTROL WITH THE GENERALIZED ANALYTICAL PREDICTOR
Pavlechko, P.D. ; Edgar, T.F.
Pub. info.: AIChE ANNUAL MEETING, NEW YORK, NY - NOVEMBER 15-20, 1987.  1987.  New York.  American Institute of Chemical Engineers
Title of ser.: AIChE meeting [papers]
Ser. no.: 1987
9.

Conference Proceedings
Conference Proceedings
9. Influence of Effective Interfacial Areas in the Operation and Control of Packed Distillation Columns
Bravo, J.L. ; Patwardhan, A.A. ; Edgar, T.F.
Pub. info.: AIChE SPRING NATIONAL MEETING -ORLANDO, FL- MARCH 18-22, 1990.  1990.  New York.  American Institute of Chemical Engineers
Title of ser.: AIChE meeting [papers]
Ser. no.: 1990
10.

Conference Proceedings
Conference Proceedings
10. Characterization of the Silane Surface Reaction in the Chemical Vapor Deposition of Polysilicon in a Cold Wall, Rapid Thermal System
Trachtenberg, I. ; Toprac, A. ; Edgar, T.F.
Pub. info.: Proceedings of the Twelfth International Symposium on Chemical Vapor Deposition.  pp.34-40,  1993.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1993-2