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Conference Proceedings

1. Planar surface-micromachined pressure sensor with a subsurface,embedded reference pressure cavity

Eaton,W.P. ; Smith,J.H.

Pub. info.:	Micromachined devices and components II : 14-15 October 1996, Austin, Texas. pp.259-265, 1996. Bellingham, WA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	2882

Conference Proceedings

2. Micromachined pressure sensors:review and recent developments

Eaton,W.P. ; Smith,J.H.

Pub. info.:	Smart structures and materials 1997 : Smart electronics and MEMS : 4-6 March 1997, San Diego, California. pp.30-41, 1997. Bellingham. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3046

Conference Proceedings

3. Release-etch modeling for complex surface-micromachined structures

Eaton,W.P. ; Smith,J.H. ; Jarecki,R.L.

Pub. info.:	Micromachining and microfabrication process technology II : 14-15 October, 1996, Austin, Texas. pp.80-93, 1996. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	2879

Conference Proceedings

4. Development of characterization tools for reliability testing of micro-electro-mechanical system actuators

Smith,N.F. ; Eaton,W.P. ; Tanner,D.M. ; Allen,J.J.

Pub. info.:	MEMS reliability for critical and space applications : 21-22 September 1999, Santa Clara, California. pp.156-164, 1999. Bellingham, Washington. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3880

Conference Proceedings

5. Linkage design effect on the reliability of surface-micromachined microengines driving a load

Tanner,D.M. ; Peterson,K.A. ; Irwin,L.A. ; Tangyunyong,P. ; Miller,W.M. ; Eaton,W.P. ; Smith,N.F. ; Rodgers,M.S.

Pub. info.:	Materials and Device Characterization in Micromachining. pp.215-226, 1998. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3512

Conference Proceedings

6. Effect of storage life and drive signals on the reliability of the Sandia Microengine

O'Neal,C.B. ; Malshe,A.P. ; Eaton,W.P.

Pub. info.:	MEMS Reliability for Critical Applications. pp.123-132, 2000. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4180

Conference Proceedings

7. Characterization techniques for surface-micromachined devices

Eaton,W.P. ; Smith,N.F. ; Irwin,L.W. ; Tanner,D.M.

Pub. info.:	Micromachined Devices and Components IV. pp.171-178, 1998. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3514

Conference Proceedings

8. First reliability test of a surface-micromachined microengine using SHiMMeR

Tanner,D.M. ; Smith,N.F. ; Bowman,D.J. ; Eaton,W.P. ; Peterson,K.A.

Pub. info.:	Micromachined Devices and Components III. pp.14-23, 1997. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3224

Conference Proceedings

9. Characterization of a surface micromachined pressure sensor array

Eaton,W.P. ; Smith,J.H.

Pub. info.:	Micromachined Devices and Components. pp.256-264, 1995. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	2642

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Conference Proceedings

10. Characterization techniques for surface-micromachined devices

Eaton,W.P. ; Smith,N.F. ; Irwin,L.W. ; Tanner,D.M.

Pub. info.:	Micromachined Devices and Components IV. pp.431-438, 1998. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3514

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Author: Eaton,W.P.