1.

Conference Proceedings

Conference Proceedings
C. Claeys ; E. Simoen ; F. Crupi ; G. Giusi
Pub. info.: ULSI process integration 5.  pp.101-114,  2007.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 11(6)
2.

Conference Proceedings

Conference Proceedings
M.B. Gonzalez ; N. Thomas ; E. Simoen ; P. Verheyen ; A. Hikavyy
Pub. info.: Analytical and diagnostic techniques for semiconductor materials, devices and processes 7.  pp.47-53,  2007.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 11(3)
3.

Conference Proceedings

Conference Proceedings
M.A. Pavanello ; J.A. Martino ; E. Simoen ; R. Rooyackers ; N. Collaert
Pub. info.: Microelectonics Technology and Devices - SBMicro 2008.  pp.253-261,  2008.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 14(1)
4.

Conference Proceedings

Conference Proceedings
L.M. Camillo ; J.A. Martino ; E. Simoen ; C. Claeys
Pub. info.: Microelectonics Technology and Devices - SBMicro 2008.  pp.243-252,  2008.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 14(1)
5.

Conference Proceedings

Conference Proceedings
C. Claeys ; S. Sonde ; E. Simoen ; A. Satta ; B. De Jaeger ; G. Nicolas ; M. Meuris
Pub. info.: Advanced gate stack, source/drain and channel engineering for Si-based CMOS 3 : new materials, processes and equipment.  pp.31-40,  2007.  Pennington, NJ.  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 6(1)
6.

Conference Proceedings

Conference Proceedings
P. Srinivasan ; E. Simoen ; L. Pantisano ; C. L. Claeys ; D. Misra ; C. Rittersma
Pub. info.: Physics and technology of high-k gate dielectrics III.  pp.681-692,  2006.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 1(5)
7.

Conference Proceedings

Conference Proceedings
M.B. Gonzalez ; E. Simoen ; E. Rosseel ; P. Verheyen ; L. Souriau
Pub. info.: Advanced gate stack, source/drain and channel engineering for Si-based CMOS 4 : new materials, processes and equipment.  pp.23-30,  2008.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 13(1)
8.

Conference Proceedings

Conference Proceedings
J. Vanhellemont ; J. Lauwaert ; J. Chen ; H. Vrielinck ; J.M. Rafi ; H. Ohyama ; E. Simoen ; D. Yang
Pub. info.: Materials and devices for end-of-roadmap and beyond CMOS scaling : symposium held April 5-9, 2010, San Francisco, California.  pp.73-78,  2010.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 1252
9.

Conference Proceedings

Conference Proceedings
C. Claeys ; E. Simoen ; P. Srinivasan ; D. Misra
Pub. info.: Dielectrics for nanosystems II: materials science, processing, reliability, and manufacturing.  pp.287-300,  2006.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 2(1)
10.

Conference Proceedings

Conference Proceedings
M. A. Pavanello ; J. A. Martino ; E. Simoen ; R. Rooyackers ; N. Collaert ; C. Claeys
Pub. info.: Microelectronics Technology and Devices : SBMICRO 2007.  pp.19-28,  2007.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 9(1)