1.

Conference Proceedings
Conference Proceedings
1. Investigation of second-harmonic generation for SOI wafer metrology
Pasternak, R. ; Jun, B. ; Schrimpf, R.D. ; Fleetwood, D.M. ; Alles, M.A. ; Dolan, R.P. ; Standley, R.W. ; Tolk, N.H.
Pub. info.: Silicon-on-insulator technology and devices XII : proceedings of the international symposium.  pp.383-388,  2005.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-03
2.

Conference Proceedings
Conference Proceedings
2. Pulsed electron beam processing of silicon devices
Greenwald, A.C. ; Dolan, R.P. ; Tobin, S.P.
Pub. info.: Laser and electron-beam solid interactions and materials processing : proceedings of the Materials Research Society Annual Meeting, November 1980, Copley Plaza Hotel, Boston, Massachusetts, U.S.A..  pp.321-328,  1981.  New York.  North Holland
Title of ser.: Materials Research Society symposia proceedings
Ser. no.: 1