1.

Conference Proceedings
Conference Proceedings
1. Improving Silicon Crystallinity by Grain Reorientation Annealing
Katherine L. Saenger ; Joel P. de Souza ; Daniel Inns ; Keith E. Fogel ; Devendra K. Sadana
Pub. info.: Amorphous and polycrystalline thin-film silicon science and technology--2009 : symposium held April 14-17, 2009, San Francisco, California, U.S.A..  pp.83-90,  2009.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 1153
2.

Conference Proceedings
Conference Proceedings
2. Effect of Elevated Implant Temperature on Amorphization and Activation in As-implanted Silicon-on-insulator Layers
Katherine L. Saenger ; Stephen W. Bedell ; Matthew Copel ; Amlan Majumdar ; John A. Ott ; Joel P. de Souza ; Steven J. Koester ; Donald R. Wall ; Devendra K. Sadana
Pub. info.: Doping engineering for front-end processing : symposium held March 25-27, 2008, San Francisco, California, U.S.A..  pp.205-210,  2008.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 1070