1.

Conference Proceedings
Conference Proceedings
1. Characterization of Oxide Etching and Wafer Cleaning Using Vapor-Phase Anhydrous HF and Ozone
Froeschle, Barbara ; Deutschmann, Lutz ; Bauer, Anton J. ; Burte, Edmund P.
Pub. info.: Rapid thermal and integrated processing VI : symposium held April 1-4, 1997, San Francisco, California, U.S.A..  pp.237-,  1997.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 470
2.

Conference Proceedings
Conference Proceedings
2. TiSi2 Characterization of CVD-Titanium and RTP on a Cluster Platform-An Initial Investigation
Marcus, Steven D. ; Deutschmann, Lutz
Pub. info.: Rapid thermal and integrated processing IV : symposium held April 17-20, 1995, San Francisco, California, U.S.A..  pp.437-,  1995.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 387