Degroote, B. ; Dekoster, J. ; Degroote, S. ; Pattyn, H. ; Vantomme, A. ; Langouche, G. ; Hou, M.
Pub. info.:
Fundamental mechanisms of low-energy-beam-modified surface growth and processing : symposium held November 29-December 2, 1999, Boston, Massachusetts, U.S.A.. pp.9-, 2000. Warrendale, Pa.. MRS-Materials Research Society
Lorusso. G. F ; Leray, P. ; Vandeweyer, T. ; Ercken, M. ; Delvaux, C. ; Pollentier, I. ; Cheng, S. ; Collaert, N. ; Rooyackers, R. ; Degroote, B.
Pub. info.:
Metrology, Inspection, and Process Control for Microlithography XX. pp.615219-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering