1.

Conference Proceedings

Conference Proceedings
Degroote, B. ; Dekoster, J. ; Degroote, S. ; Pattyn, H. ; Vantomme, A. ; Langouche, G. ; Hou, M.
Pub. info.: Fundamental mechanisms of low-energy-beam-modified surface growth and processing : symposium held November 29-December 2, 1999, Boston, Massachusetts, U.S.A..  pp.9-,  2000.  Warrendale, Pa..  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 585
2.

Conference Proceedings

Conference Proceedings
Lorusso. G. F ; Leray, P. ; Vandeweyer, T. ; Ercken, M. ; Delvaux, C. ; Pollentier, I. ; Cheng, S. ; Collaert, N. ; Rooyackers, R. ; Degroote, B.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XX.  pp.615219-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6152