1.

Conference Proceedings
Conference Proceedings
1. Optimization of Polysilicon-Encapsulated LOCOS for 0.25 μm CMOS: Correlation Between Stress and Gate Oxide Integrity
Badenes, G. ; Rooyackers, R. ; De Wolf, I. ; Deferm, L.
Pub. info.: ULSI science and technology, 1997 : proceedings of the Sixth International Symposium on Ultralarge Scale Integration Science and Technology.  pp.467-478,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-3
2.

Conference Proceedings
Conference Proceedings
2. 0.13 μm CMOS Technology with Optimized Poly-Si/No-Oxide Gate Stack
Kubicek, S. ; Jansen, P. ; Badenes, G. ; Schaekers, M. ; Koldyaev, V. ; Deferm, L. ; De Meyer, K. ; Kerr, D. ; Naem, A.
Pub. info.: ULSI process integration : proceedings of the first international symposium.  pp.193-202,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-18
3.

Conference Proceedings
Conference Proceedings
3. A New Dummy-free Shallow Trench Isolation Concept for Mixed-Signal Applications
Badenes, G. ; Rooyackers, R. ; Augendre, E. ; Vandamme, E. ; Perello, C. ; Heylen, N. ; Grillaert, J. ; Deferm, L.
Pub. info.: ULSI process integration : proceedings of the first international symposium.  pp.231-242,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-18
4.

Conference Proceedings
Conference Proceedings
4. Impact of processing parameters on leakage current and defect behaviour of N+P silicon junction diodes
Gramenova, E. ; Jansen, Ph. ; Simoen, E. ; Vanhellemont, J. ; Dupas, L. ; Deferm, L.
Pub. info.: Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II.  pp.228-242,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-22
5.

Conference Proceedings
Conference Proceedings
5. Combined ΔL and Series Resistance Extraction of LDD MOSFETs at 77 K
Schreutelkamp, R. ; Martino, J.A. ; Simoen, E. ; Deferm, L. ; Ciaeys, C.
Pub. info.: Proceedings of the Symposium on Low Temperature Electronics and High Temperature Superconductivity.  pp.290-296,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-9